| TOPExhibitors Index (Category Index)Panel Manufacturing Process Related DevicesAshing Devices

Ashing Devices   [Disclosed Information: 2]  

  • SEKISUI CHEMICAL
    Please expect it of the APP solution of Sekisui Chemical.

    Sekisui total AP solutions, "AP plasma" are targeting continuous business growth in responding to the expectations of our customers.

    ProductsAtmospheric Plasma Etching System APE-series, Atmospheric Plasma Surface Treatment System RT-series, Atmospheric Plasma Surface Treatment System APH-series, Atmospheric Plasma Surface Treatment System for Film RD-series, Atmospheric Plasma Descum System APD-series
  • TOKYO ELECTRON
    FPD Dry Etching/Ashing system & Coater/Developer system

    Tokyo Electron provides FPD Etching/Ashing System and FPD Coater/Developer System from the 3rd generation to the 10th generation.

    We would like to introduce our Etching/Ashing system "HT-Series"(for Gen.4) and "Impressio(TM)"(for Gen.7~10), Coater/Developer system "CS1000"(for Gen.4) and "Exceliner(TM)"(for Gen.7~10). Also, this time we will present TAC(TEL Advanced Coater).

    ProductsCoater/Developer System [Exceliner(TM)], Dry Etching/Ashing System [Impressio(TM)]

Concurrent event: Green Device 2010

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