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Booth: 6111

  • TOKYO ELECTRON
    ExhibitorTOKYO ELECTRON LTD.
    DivisionFPD Division
    Address5-3-1 Akasaka, Minato-ku, TOKYO
    TEL+81-3-5561-7000
    URLhttp://www.tel.co.jp/
    FPD Dry Etching/Ashing system & Coater/Developer system

    Tokyo Electron provides FPD Etching/Ashing System and FPD Coater/Developer System from the 3rd generation to the 10th generation.

    We would like to introduce our Etching/Ashing system "HT-Series"(for Gen.4) and "Impressio(TM)"(for Gen.7~10), Coater/Developer system "CS1000"(for Gen.4) and "Exceliner(TM)"(for Gen.7~10). Also, this time we will present TAC(TEL Advanced Coater).

    Product1Coater/Developer System [Exceliner(TM)]
    Product2Dry Etching/Ashing System [Impressio(TM)]

Concurrent event: Green Device 2010

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  • Displays/Panels
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  • Mask/Reticle Manufacturing Devices
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